UV fused silica is a synthetic silica glass material for used in the ultraviolet which has extremely high optical transmission with very low optical absorption. Fused silica has excellent homogeneity and resistance to high power laser energy, with the ability to stand temperatures over 1000°C. UV fused silica has very low thermal expansion and high uv transmission allowing rapid changes in temperature without risk of breakage due to thermal shock.

There are several grades which can offer UV fluorescent free, improved refractive index homogeneity and excimor laser grades for maximum transmission and prolonged life in microlityography.